CHARPAN

Charged Particle Nanotech

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PAPERS & POSTERS

Reviewed papers and posters presented at international conferences reflect the milestones achieved in the CHARPAN project. They show the progress made not only in prototype development (e.g. Platzgummer 2007), but also in the research into potential applications (e.g. Butschke, 2007, van Delft 2007), into alternative ion sources (e.g. Kolodney, 2006) and into properties of structured material (e.g. Beuer, 2007) relevant to the applicability of the technology.

Petersen, S. et al.: "Electical Characterisation of FIB Induced Damage in Silicon by SSRM", EFUG 2007, Arcachon, France, 2007, Oct 8.

Minev, R.: "FIB Milling and Characterization of CrC Coatings on Tool Steel Substrate", Paper presentation: 4M 2007, Borovets, Bulgaria, 2007 Oct 3-5.

Dimov, S.: "Synergetic Process Integration of Efficient Micro & Nano Manufacture", Special session co-organised by CHARPAN: 4M 2007, Borovets, Bulgaria, 2007 Oct 3-5.

Lalev, G. et al.: "A CAD/CAM approach for layer-based FIB processing", Invited talk: 4M 2007, Borovets, Bulgaria, 2007 Oct 3-5.

Kettle, J. et al.: "Development of functional material for Step and Flash Imprint Lithography process", Poster presentation: MNE'07, Copenhagen, Denmark, 2007 Sep 23-26.

Kettle, J. et al.: "Fabrication of patterned 3- nickel components with electroforming and Step and Flash Imprint Lithography", Poster presentation: MNE'07, Copenhagen, Denmark, 2007 Sep 23-26.

Rius, G. et al: "Characterization at the nanometer scale of local electron beam irradiation of CNT based devices", Poster presentation: MNE'07, Copenhagen, Denmark, 2007 Sep 23-26.

Borrisé, X. et al.: "Focused ion beam fabrication and functionalization of CMOS integrated silicon nanocantilevers", Poster presentation: MNE'07, Copenhagen, Denmark, 2007 Sep 23-26.

van Delft, F. et al.: "3-dimensional Projection Mask-Less Patterning (PMLP) of microlenses and cones: modelling and monitoring of ion multi-beam kinetic sputtering in GaAs", Poster Presentation: MNE'07, Copenhagen, Denmark, 2007 Sep 23-26.

Butschke, J. et al.: "Resist-less mask structuring using an ion multi-beam projection pattern generator", Poster Presentation: SPIE Photomask Technology (BACUS) Conference, Monterey, CA, USA, 2007 Sep 17-21.

Platzgummer, E. et al.: "Projection Mask-Less Patterning (PMLP) for the fabrication of Leading Edge Complex Masks and Nanoimprint Templates", Poster Presentation: SPIE Photomask Technology (BACUS) Conference, Monterey, CA, USA, 2007 Sep 17-21.

Dimov, S.: Invited talk on 4M technologies including the CHARPAN PoC tool: 2nd Int. Conference on MicroManufacturing, Greenville, South Carolina, USA, 2007 Sep 10-13.

Kettle, J. et al.: "Fabrication of lenses for AlGaInP LEDs using Step and Flash Imprint lithography", Oral presentation: 7th IEEE International Conference on Nanotechnology, Hong Kong, China, 2007 Aug 2-5.

Arcamone, J. et al.: "Mass measurements based on nanomechanical devices: differential measurements", Oral presentation: ICN+T 2007 (32nd International Conference on Nano Science and Technology), Stockholm, Sweden, 2007 Jul 2-6.

Beuer, S. et al.: "SSRM Characterisation of FIB Induced Damage in Silicon", Poster presentation: ICN+T 2007 (32nd International Conference on Nano Science and Technology), Stockholm, Sweden, 2007 Jul 2-6.

Löschner, H.: "Projection Mask-Less Patterning for high value-added Nanotechnology Applications", Invited talk: EuroNanoForum 2007, Düsseldorf, Germany, 2007 Jun 23.

Rius, G., et al.: "Rapid thermal CVD growth of carbon nanotube transistors and its response to electron beam exposure", Poster Presentation: E-MRS 2007 Spring Meeting, Strasbourg, France, 2007 May 28 - Jun 1.

Butschke, J., et al.: "3D Template fabrication process for the Dual Damascene NIL approach"Photomask Japan, 2007 Apr 17-20.

Gheorghiu, E.: "BioDynSensing: Sensing through dynamics of (bio)interfaces or/and cellular platforms" Workshop on Physics of Sensors and Detection Systems, Ispra, Italy, 2006 Dec 06-07.

Bellouard, Y.: "Ion Beam Projection Techniques For Locally Modifying Phase Transformation Properties In Shape Memory Alloys", Material Research Society (MRS 2006), Fall Meeting, Boston, USA, 2006 Nov 27-Dec 1.

Schoendorfer, C. et al.: "Focused Ion Beam Induced Growth of Antimony Nanowires" Material Research Society (MRS 2006), Fall Meeting, Boston, USA, 2006 Nov 27-Dec 1.

Fernandez-Cuesta, I. et al.: "Fast Antisticking Coating at Room Temperature: Process and Characterization", NNT'06, San Francisco, USA, 2006 Nov 15-17.

Steiger, A.: "Focused Ion Beam Sputtering and Gas Assisted Etching of Quartz", European FIB User Group meeting (EFUG), Wuppertal, Germany, 2006 Oct 2.

Lalev, G.: "Charged Particle Nanotech - CHARPAN project", Invited Talk: MICRONORA, Besancon, France, 2006 Sep 28.

Dietzel, A.: "Micro- and Nano-Structuring using Ions", Invited Talk: 4M 2006, Grenoble, France, 2006 Sep 20-22.

Manor, Y. et al.: "Fullerenes as a novel target/projectile in ion surface impact interactions and synthesis", Oral presentation: IBMM 2006 (15th International Conference on Ion Beam Modification of Materials 2006), Taormina, Italy, 2006 Sep 18-22.

Lugstein A. et al.: "Synthesis of nanowires in room temperature ambient with a focused ion beam", Poster presentation: IBMM 2006 (15th International Conference on Ion Beam Modification of Materials 2006), Taormina, Italy, 2006 Sep 18-22.

Karade Y.: "Controlled sub-Micrometer Surface Morphologies by Thermal Relaxation of Locally Crosslinked Stretched Polymer Samples" Poster presentation: MNE'06, Barcelona, Spain, 2006 Sep 17-20.

Kolodney, E.: "Progress and prospects of focused C60 ion beams" Invited talk: MNE'06, Barcelona, Spain, 2006 Sep 17-20.

Li, W. et al.: "Fabrication of micro/nano-features in fused silica using focused-ion-beam", Poster presentation: MNE'06, Barcelona, Spain, 2006 Sep 17-20.

Beuer, S. et al.: "Accurate parameter extraction for the simulation of direct structuring by ion beams" Poster presentation: MNE'06, Barcelona, Spain, 2006 Sep 17-20.

Schoendorfer, C. et al.: "FIB induced growth of antimony nanowires" Poster presentation: MNE'06, Barcelona, Spain, 2006 Sep 17-20.

Rius, G. et al.: "Response of carbon nanotube transistors to electron beam exposure" Poster presentation: MNE'06, Barcelona, Spain, 2006 Sep 17-20.

Schoendorfer, C.: "A new metallic nanowire growth technique utilizing focused ion beams", ICPS-28 (28th International Conference on the Physics of Semiconductors), Vienna, Austria, 2006 Jul 24-28.

Platzgummer, E. et al.: "CHARPAN (Charged Particle Nanotech) for sub-50-nm mask and template fabrication", Poster Presentation [6151-154]: SPIE Microlithography, San Jose, California, USA, 2006 Feb 23.

Lugstein A.: "A new metallic nanowire growth technique utilizing focused ion beams", MRS 2005, Boston, USA, 2005 Nov 28-Dec 2.

Kolodney, E.: "Very-low-energy implantation of single ions into surface adsorbed fullerenes", MNE 2005, Vienna, Austria, 2005 Sep 19-22.

Platzgummer, E. et al.: "Simulation of ion beam direct structuring for 3D nanoimprint template fabrication", MNE 2005, Vienna, Austria, 2005 Sep 19-22.

Wilhelm Bruenger et al.: "Ion Projection Surface Structuring with Noble Gas Ions", invited talk, 14th International Conference on Surface Modification of Materials by Ion Beams (SMMIB'05), Kusadasi, Turkey, 2005 Sep 04.