CHARPAN

• the ion projection surface structuring process (e.g. Bruenger et.al., 2007),
• potential applications (e.g. Li et.al., 2007),
• properties of material structured by ion beam - an issue relevant to the applicability of the technology - (e.g. Lugstein et.al., 2007),
• the simulation of ion beam structuring (e.g. Platzgummer, 2006), which is key for process development.

“Projection Mask-Less Patterning (PMLP) for the fabrication of leading-edge complex masks and nano-imprint templates”

SPIE BACUS News Vol. 24, Issue 3, 1-9 (2008)

S. Beuer, M. Rommel, Ch. Lehrer, A.J. Bauer, H. Ryssel, E.Platzgummer, S. Kvasnica: "Accurate parameter extraction for the simulation of direct structuring by ion beams" Microelectronic Engineering 84, 810-813 (2007)

W.H. Bruenger, A.H. Dietzel, H. Loeschner, "Ion Projection Surface Structuring with Noble Gas Ions at 75 keV", Surface Coatings International, Vol. 201, 19-20, 8437-8441, (2007)

J. Butschke, M. Irmscher, D. Resnick, H. Sailer, E. Thompson: "3D Template fabrication process for the Dual Damascene NIL approach" Photomask and Next-Generation Lithography Mask Technology XIV. Edited by Watanabe, Hidehiro. Proceedings of the SPIE, Volume 6607, pp. 66070U, (2007)

Y. Karade, K. Graf, W. Bruenger, A. Dietzel, R. Berger: "Oriented nanometer surface morphologies by thermal relaxation of locally cross linked and stretched polymer samples" Microelectronic Engineering 84, 797-801 (2007)

G Lalev, J Kettle, R Perks, S Dimov: "Fabrication of lenses for LEDs using novel 3-D data preparation technique for FIB milling", 7th IEEE International Conference on Nanotechnology, 2-5 August 2007, Hong Kong

G. Lalev, S. Dimov, J. Kettle, R. Minev, F. van Delft: "A CAD/CAM approach for layer-based FIB processing", Proc. Int. Conf. 4M2007, Whittles Publishing

W. Li, G. Lalev, S. Dimov, H. Zhao and D.T. Pham: "A study of fused silica micro/nano patterning by focused-ion-beam", Applied Surface Science, Vol. 253, 7, 3608-361430, (2007)

W. Li, R. Minev, S. Dimov, G. Lalev: "Patterning of amorphous and polycrystalline Ni78B14Si8 with a focused-ion-beam", Applied Surface Science, Vol. 253, 12, 5404-5410, (2007)

W. Li, S. Dimov, G. Lalev, "Focused-ion-beam direct structuring of fused silica for fabrication of nano-imprinting templates", Microelectronic Engineering, Vol. 84, 829-832, (2007)

A. Lugstein, M. Steinmair, Y. J. Hyun, E. Bertagnolli, P. Pongratz: "Ga/Au alloy catalyst for single crystal silicon-nanowire epitaxy", Applied Physics Letters, Volume 90, 2, id. 023109 (3 pages), (2007)

A. Lugstein, C. Schoendorfer, M. Weil, C. Tomastik, A. Jauss, E. Bertagnolli: "Study of focused ion beam response of GaSb", Nuclear Instruments and Methods in Physics Research Section B, Vol. 255, 2, 309-313, (2007)

R.M. Minev, J. Kettle, G. Lalev, S.S. Dimov M. Ilieva, M. Ilieva, I. Dermendjiev, R. Shishkov: "FIB Milling and Characterization of CrC Coatings on Tool Steel Substrate", Proc. Int. Conf. 4M2007, Whittles Publishing

G. Rius, I. Martin, P. Godignon, A. Bachtold, J. Bausells, E. Lora-Tamayo, F. Perez-Murano: "Response of carbon nanotube transistors to electron beam exposure", Microelectronic Engineering 84, 1596-1600, 2007

D.J.G. Bakewell, D.V Nicolau: "Protein Linear Molecular Motor-Powered Nanodevices" Australian Journal of Chemistry. 60, 314-332, 2007.

D.V. Nicolau, G. Solana, M. Kekic, F. Fulga, C. Mahanivong, J. Wright, C.G. dos Remedios: "Surface Hydrophobicity Modulates the Operation of Actomyosin-Based Dynamic Nanodevices" Langmuir, 23, 10846-10854, 2007