CHARPAN

Charged Particle Nanotech

Project

OVERVIEW

CHARPAN - Charged Particle Nanotech is an Integrated Project in the European Sixth Framework Programme (FP6), in the research priority NMP ("Nanotechnologies and Nanosciences, knowledge-based Multifunctional Materials, and new Production Processes and Devices").

The Production Process and Device for Nanomanufacturing developed in this project aims at fulfilling industry's need of being 1) flexible, 2) rapid and 3) cost-effective even for small production lots.

Projection Mask-Less Patterning (PMLP) technology, based on hundreds of thousands of finely focused particle (ion) beams with <10nm resolution, is able to fulfil these requirements.

A proof-of-concept tool applying PMLP technology has been realized in the CHARPAN project. It is already demonstrating <20nm resolution and 3-dimensional nanopatterning of surfaces.

CHARPAN is based on the expertise of a team of 19partners from industry, academia and research institutes from 12 countries (Australia, Austria, Czech Republic, France, Germany, Israel, Netherlands, Romania, Russian Federation, Slovak Republic, Spain, and the United Kingdom). The project is coordinated by IMS Nanofabrication AG, Vienna, Austria.

For a more detailed overview of the current status of the CHARPAN project, please see the Executive Summary of the current Project Activity Report here