CHARPAN
Charged Particle Nanotech
Project
APPLICATIONS
In the CHARPAN project an extremely versatile PMLP-tool is developed.
Potential Applicationsrange from mask-making to nano-optics and nano-bio-patterning; potential processes include sputtering, etching and many more.
Important achievements in applications development have been made:
- Promising Industrial Applications have been explored, including "Above-IC" nanoimprinting of microlenses for imager chips and high end optical devices for communication. Information on some of these topics is restricted.
- Further, there were substantial achievements in several fields of Nano-Research.
- Important progress in ion beam simulation has been made, which is key for process development.
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