CHARPAN
Charged Particle Nanotech
Project
Potential Applications
Right from the beginning of the CHARPAN project it was assumed that the PMLP-tool will be applied primarily for complex 2D and 3D structuring. An example is shown in the image simulating a gas assisted etching process.
Among the wide field of possible applications, some have been identified to particularly deploy the uniqueness of CHARPAN. The versatile CHARPAN technology offers several patterning processes, such as
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These processes are regarded to be fundamental for a large number of promising CHARPAN applications for emerging nanotechnology industries. Among the most promising applications there are 3D mask and nanoimprint template fabrication for micro- and nano-optics and biomedical devices. Here are some examples simulating CHARPAN multi-ion beam kinetic sputtering.
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