CHARPAN

Coordinator (leader WP11) and developing SME in charge of Tool Development (WP 2), and Training and Establishment of Implementation Guidelines (WP10)

Institut für Mikroelektronik Stuttgart

Advanced technology institute leading WP1 on User Requirements and Continuous Evaluation, leading WP9 on CHARPAN Exploitation and Dissemination, and participation in WP3 (Application Specific Process Development)

Fraunhofer Gesellschaft Institut für Siliziumtechnologie (ISIT) and Institut für Integrierte Systeme und Bauelemente technologie (IISB)

Research partner represented by ISIT developing and fabricating the programmable aperture plate in WP2 “Tool Development” and IISB developing new processes and equipment for semiconductor processing as well as leading WP3

Development of CHARPAN tool: Ion source design and manufacturing, testing of ion beam irradiation resistance

Manufacturing Engineering Centre, Cardiff University

Manufacturing centre validating CHARPAN as a new technology route for manufacture of micro-tooling inserts/plates.

Centro Nacional de Microelectrónica

Research organization using the technology developed for fabrication of nanomechanical devices and nanometer scale electrodes.

Commissariat à l'Energie Atomique Laboratoire d'Innovations pour les Technologies des Energies nouvelles et les Nanomatériaux (LITEN) and Laboratoire d'Electronique de Technologie de l'Information (LETI) Commissariat à l'Energie Atomique

Research partner carrying out research and development for CHARPAN applications with focus on several key nano technological aspects

University involved in Application Specific Process Development (WP3) and Application Research (surface, nano applications) in WP4

Technion - Israel Institute of Technology

Technion - Israel Institute of Technology Israel HE Research partner leading WP4 "Research on ion-surface interactions and new ion sources for CHARPAN applications" and developer of a novel ion source (C60) adapted to the CHARPAN tool (WP2 , delivering a prototype)

Industry partner providing expertise in optical systems and developing CHARPAN processes and provide research on emerging applications in optical devices

Gesellschaft für Technologie-förderung Itzehoe GmbH

Administrative secretariat for coordinator Dr. Platzgummer (IMS) in WP11 on Project Management

Research Centre participating in WP4 dealing with Research on Ion surface Interactions and Ion Sources for CHARPAN Applications

Research partner in application driven process development and research on emerging applications in biotechnology and medicine (WP4)

Research partner participating in WP9 on CHARPAN Exploitation and Dissemination, primarily responsible for planning of business development tasks to be executed by major industry players

Philips Research Laboratories Eindhoven

Industry partner leading WP7 "CHARPAN End-user Testing, Validation" and WP8 "CHARPAN End-user Demonstration" and participating in exploitation of project results

Institute of Microelectronics Technology,
Russian Academy of Sciences

Research partner participating in WP 4 "Research on Ion surface Interactions and Ion Sources for CHARPAN Applications" and contributing heavily to WP2 "CHARPAN Tool Development"

Technische Universiteit Eindhoven

Leading edge research organisation responsible for WP5 "Research on Emerging Applications for CHARPAN in Nanoscience"

University of Liverpool

Research partner in application driven process development and research on emerging applications in biotechnology and medicine (WP4)