CHARPAN

Charged Particle Nanotech

Project

Charged particle optical column

For realising the PMLP a charged particle optical column is needed. It comprises of:

A. ion / electron source

B. condenser system to form a broad parallel beam

C. programmable patterning module to structure the beam and allow for dynamic pattern generation

D. 200x reduction optics to reduce the shaped beams and thus form a multitude of high-intensity charged particle beams with ultra-high resolution working at the substrate in parallel